An anodic bond is modeled as a moving non-material line forming theintersection of three material surfaces representing the unbonded conductor,the unbonded insulator, and the bonded interface. The component mass balanceequations, Gauss' law, and the linear momentum equations are cast in afinite-element formulation, which is used to predict the evolution of thesodium ion concentration, electric potential, and stress during the anodicbonding of Pyrex glass and silicon. The method is applicable to theviscoplasticity of solid electrolytes, and the volume and interface freeenergies can be modified to model electromechanical interface phenomena suchas debonding, space charge accumulation and sliding at grain boundaries inionic crystals, and a cohesive zone theory of piezoelectric fracture.
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