This paper presents two types of attenuation-controllable 2×2 optical switches utilizing V-shaped 45-deg micromirrors. One type utilizes four single-face mirrors, and the other has a simplified configuration utilizing two double-face mirrors. The designed devices were fabricated on a silicon-on-insulator wafer with a structural layer of 80-μm thickness. Two pairs of lensed fibers with a focal length of 150 μm were aligned for optical characterization. Experiments on the simplified design showed optical insertion losses of less than 1.9 dB and on/off ratios larger than 70 dB. The optical power can be controlled up to a maximum attenuation level of 50 dB within ±0.1 dB tolerance in the other channels. Because the overall optical performance of the two types was verified to be almost the same, the simplified design will be more desirable for practical applications.
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