Simple, high precision linearhyphen;motorhyphen;drivenXYTHgr; positioner (Walker)

V. G. Dudnikov; D. V. Kovalevsky; A. L. Shabalin

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Simple, high precision linearhyphen;motorhyphen;drivenXYTHgr; positioner (Walker)

机译：Simple, high precision linearhyphen;motorhyphen;drivenXYTHgr; positioner (Walker)

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摘要

A very simple construction of a linearhyphen;motorhyphen;drivenXYTHgr; positioner has been developed. The velocities can be controlled up to 4 mm/s. Positioning accuracy of better than 0.05 mgr;m can easily be obtained.

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《review of scientific instruments》 |1991年第10期|2492-2492|共页
作者
V. G. Dudnikov; D. V. Kovalevsky; A. L. Shabalin;
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Simple, high precision linearhyphen;motorhyphen;drivenXYTHgr; positioner (Walker)

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