Phase-height mapping and coordinate calibration simultaneously in phase-measuring profilometry

Xianyu Su; Wanzhong Song; Yiping CaoLiqun Xiang

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Phase-height mapping and coordinate calibration simultaneously in phase-measuring profilometry

机译：Phase-height mapping and coordinate calibration simultaneously in phase-measuring profilometry

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摘要

A new method for both the phase-height mapping and the 3-D coordinate calibration in phase-measuring profilometry (PMP) is presented. A calibration gauge containing four virtual calibration planes is designed. The application of the calibration gauge avoids the translation of the standard plane during the calibration process. Furthermore, circular steps are designed to calibrate lateral coordinates automatically. With this calibration gauge, both the phase-height mapping and lateral coordinates calibration could be done simultaneously through only one measurement. Additionally, to recover a continuous phase distribution of all the steps with the same height, an iterative procedure is proposed. The effectiveness of the proposed method is demonstrated by experimental results.

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来源
《Optical Engineering》 |2004年第3期|708-712|共5页
作者
Xianyu Su; Wanzhong Song; Yiping CaoLiqun Xiang;
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作者单位

Sichuan University Opto-electronics Department Chengdu 610064, China;

Allsep Technologies, Inc. 15 East Palatine Road, Suite 107 Prospect Heights, IL 60070;

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);
原文格式 PDF
正文语种英语
中图分类光学仪器;
关键词
phase-measuring profilometry; phase-height mapping; lateral coordinates calibration;

Phase-height mapping and coordinate calibration simultaneously in phase-measuring profilometry

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