Beam distortion profiles are studied for scanning devices that have a single mirror with two rotational degrees of freedom (DOF), also named tip/tilt scanners. The case of a fast steering scanner used for high power material processing applications is studied. The scanner has a bandwidth of 700 Hz, a range of motion of ±52 mrad (±3 deg), and a resolution <5 μrad. The main dominant parameters that affect the distortion profile are identified. Furthermore, a vector analysis is derived to represent these distortions, and equations of the correction factors used to compensate for the systematic errors are proposed. A final accuracy better than 0.05 is obtained when these compensation factors are taken into account. The derivation proposed here can be extended to any scanning device with a single mirror with two-rotation DOF.
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