Nippon Steel has developed a production technology for nano-spacelab. Substrate having surficinal large periodic superstructures ofoxide thin layer and graphite as well as a technology for evaluationof its surface characteristic distribution at the namo level. Inoxides, optimization of sputtering conditions showed that the surfacenano unevenness structure is controllable. In graphite, solid phaseprecipitation from palladium showed that large periodicsuperstructures of electron density can be formed. At the same time,Nippon Steel has developed a scanning probe micros- copy (SPM)technology for evaluation.
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