Humidity response properties of a potentiometric sensor using LaF_(3) thin film as the solid electrolyte

Guoliang Sun; Hairong Wang; Zhuangde Jiang

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Humidity response properties of a potentiometric sensor using LaF_(3) thin film as the solid electrolyte

机译：Humidity response properties of a potentiometric sensor using LaF_(3) thin film as the solid electrolyte

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A thin-film type potentiometric sensor has been prepared by the implementation of electro-beam evaporation, rf magnetron sputtering methods, and micromachining processes. Sn film was deposited on n-Si/SiO_(2) (400 nm) substrate. A deposited LaF_(3) film was applied as solid electrolyte and sputtered Pt film was used as the sensing electrode. The patterns of the Pt and LaF_(3) were realized by the micromachining processes. The LaF_(3) film was characterized by scanning electron microscopy and energy dispersive x ray. Saturated aqueous solutions were used to achieve controlled humidity environments. When the sensor was exposed to humidity environments, the electromotive force (EMF) of the sensor was examined. It was found that the sensor varies with the relative humidity (RH). The stable response curve was presented and non-Nernst behavior between the average EMF values and RH may be shown.

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来源
《Review of Scientific Instruments》 |2011年第8期|083901-1-083901-4|共4页
作者
Guoliang Sun; Hairong Wang; Zhuangde Jiang;
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作者单位

State Key Laboratory for Manufacturing Systems Engineering, Xi'an Shaanxi 710049, People's Republic of China;

Institute of Precision Engineering, Xi'an Jiaotong University, Xi'an Shaanxi 710049, People's Republic of China;

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Humidity response properties of a potentiometric sensor using LaF_(3) thin film as the solid electrolyte

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