Fabrication for multilayered composite thin films by dual-channel vacuum arc deposition

Hua Dai; Yao Shen; Jing WangMing XuLiuhe LiXiaoling LiXun CaiPaul K. Chu

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Fabrication for multilayered composite thin films by dual-channel vacuum arc deposition

机译：Fabrication for multilayered composite thin films by dual-channel vacuum arc deposition

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A flexible dual-channel curvilinear electromagnetic filter has been designed and constructed to fabricate multilayered composite films in vacuum arc ion plating. The filter possesses two guiding channels and one mixing unit. Multilayered TiN/AlN and TiAlN composite films can be produced by controlling the frequency or interval of the two cathodes. The x-ray photoelectron spectroscopy and low-angle x-ray diffraction results reveal the periodic Ti and Al structures in the TiN/AlN films. The TiAlN films exhibit a smooth surface morphology confirming effective filtering of macroparticles by the filter. High temperature oxidation conducted at 700 deg C for an hour indicates that the weight increment in the TiAlN films produced by the dual filter is only half of that of the TiAlN films produced without a filter, thereby showing better resistance against surface oxidation.

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来源
《Review of Scientific Instruments》 |2008年第6期|065104-1-065104-5-0|共5页
作者
Hua Dai; Yao Shen; Jing WangMing XuLiuhe LiXiaoling LiXun CaiPaul K. Chu;
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Shanghai Key Laboratory of Materials Laser Processing and Modification, School of Materials Science and Engineering, Shanghai Jiao Tong University, Shanghai 200240, People's Republic of China;

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正文语种英语
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Fabrication for multilayered composite thin films by dual-channel vacuum arc deposition

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