The formation of superconducting YBa_2Cu_3O_(7-x) by in situ pulsed laser deposition from a stoichiometric Y123 target typically requires an oxygen-ambient environment (P approx 100-300-mtorr O_2) and appropriate substrate temperature during deposition. We have found that pulsed laser deposition from a Y123 target in vacuo onto a (001) LaAlO_3 substrate favors the formation of Y_2O_3. We observed that the Y_2O_3(001) films yield three-dimensional nanoscale morphologies that are markedly different from the planar growth surface of conventional superconducting c-axis Y123 films and Y_2O_3 films formed form the pulsed laser ablation of a Y_2O_3 target.
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