On-chip silicon optical phased array for two-dimensional beam steering

David Kwong; Amir Hosseini; John CoveyYang ZhangXiaochuan XuHarish SubbaramanRay T. Chen

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On-chip silicon optical phased array for two-dimensional beam steering

机译：用于二维光束控制的片上硅光学相控阵

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A 16-element optical phased array integrated on chip is presented for achieving two-dimensional (2D) optical beam steering. The device is fabricated on the silicon-on-insulator platform with a 250 nm silicon device layer. Steering is achieved via a combination of wavelength tuning and thermo-optic phase shifting with a switching power of P_π = 20 mW per channel. Using a silicon waveguide grating with a polycrystalline silicon overlay enables narrow far field beam widths while mitigating the precise etching needed for conventional shallow etch gratings. Using this system, 2D steering across a 20° × 15° field of view is achieved with a sidelobe level better than 10 dB and with beam widths of 1.2° × 0.5°.

机译：提出了一种集成在芯片上的16元件光学相控阵，用于实现二维（2D）光束控制。该器件在具有 250 nm 硅器件层的绝缘体上硅平台上制造。通过波长调谐和热光相移的组合实现转向，每通道开关功率为 P_π = 20 mW。使用带有多晶硅覆盖层的硅波导光栅可实现较窄的远场光束宽度，同时减轻传统浅蚀刻光栅所需的精确蚀刻。使用该系统，可在 20° × 15° 视场上实现 2D 转向，旁瓣电平优于 10 dB，波束宽度为 1.2° × 0.5°。

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来源
《Optics Letters》 |2014年第4期|941-944|共4页
作者
David Kwong; Amir Hosseini; John CoveyYang ZhangXiaochuan XuHarish SubbaramanRay T. Chen;
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作者单位

Microelectronics Research Center, Department of Electrical and Computer Engineering, University of Texas at Austin, 10100 Burnet Rd., Austin, Texas 78758, USA;

Omega Optics, Inc, 10306 Sausalito Dr., Austin, Texas 78759, USA;

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中图分类计量学;
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On-chip silicon optical phased array for two-dimensional beam steering

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