A novel design is presented for a cryogenically cooled multisubstrate sample holder for thin film deposition in high vacuum. The cryogen flows through tubing soldered onto a fixed copper plate, while the substrates are mounted on a separate tray that is supported by a linear/rotaryhyphen;motion feedthrough. By lowering the substrate tray into firm contact with the copper plate, substrate temperatures as low as 120 K can be achieved. copy;1994 American Institute of Physics.
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