A new method for position measurement with CCDs is presented. Two-dimensional position coordinates can be precisely measured in a short time with a special optical system having two linear array CCDs. The experimental setup with a signal-processing unit is described in detail. Experimental results are shown, and the sources of error are analyzed. # 1998 Society of Photo-Optical Instrumentation Engineers. S0091-3286(98)00509-1 Subject terms: position measurement; linear array CCD; signal processing. Paper 09127 received Dec. 8, 1997; revised manuscript received Apr. 3, 1998; accepted for publication Apr. 4, 1998.
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