Characterizing piezoscanner hysteresis and creep using optical levers and a reference nanopositioning stage

H. Xie; M. Rakotondrabe; S. Regnier

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Characterizing piezoscanner hysteresis and creep using optical levers and a reference nanopositioning stage

机译：Characterizing piezoscanner hysteresis and creep using optical levers and a reference nanopositioning stage

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A method using atomic force microscope (AFM) optical levers and a reference nanopositioning stage has been developed to characterize piezoscanner hysteresis and creep. The piezoscanner is fixed on a closed-loop nanopositioning stage, both of which have the same arrangement on each axis of the three spatial directions inside the AFM-based nanomanipulation system. In order to achieve characterization, the optical lever is used as a displacement sensor to measure the relative movement between the nanopositioning stage and the piezoscanner by lateral tracking a well-defined slope with the tapping mode of the AFM cantilever. This setup can be used to estimate a piezoscanner's voltage input with a reference displacement from the nanopositioning stage. The hysteresis and creep were accurately calibrated by the method presented, which use the current setup of the AFM-based nanomanipulation system without any modification or additional devices.

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《Review of Scientific Instruments》 |2009年第4期|046102-1-046102-3|共3页
作者
H. Xie; M. Rakotondrabe; S. Regnier;
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作者单位

Institute of Intelligent System and Robotics, University of Pierre and Marie Curie/CNRS UMR 7222, 4 Place Jussieu, 75005 Paris, France;

Department of Automatic Control and Micro-Mechatronic Systems, FEMTO-ST Institute, CNRS UMR 6174-UFC/ENSMM/UTBM, 24, Rue Alain Savary, 25000 Besancon, France;

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Characterizing piezoscanner hysteresis and creep using optical levers and a reference nanopositioning stage

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