The Properties of Antimony-doped Tin Oxide Thin Films by the Sol-Gel Approach

Lan Zhao; Daoli Zhang; Gang DuJianmei XuDonxian Zhou

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The Properties of Antimony-doped Tin Oxide Thin Films by the Sol-Gel Approach

机译：The Properties of Antimony-doped Tin Oxide Thin Films by the Sol-Gel Approach

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Antimony-doped tin oxide thin films have a range of technical applications as conductive coatings, and sol-gel processing seems to offer some advantages over other coating techniques. In this study, the sol was prepared by sol-gel approach from SnO_2 H_2O and SbCl_3 in alcohol. It was found that the heat-treatment temperature and doping level have strong influences on the microstructure and composition of Sb: SnO_2 films. The SnO_2 crystals exist mainly as tetragonal rutile structure. The optimum heat-treatment temperature is about 450 ～ 500℃, and the film is composed with nano-crystals and nano-pores. Microstructure and the electrical behaviors of Sb-doped SnO_2 thin films derived by sol-gel process were investigated.

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《Key engineering materials》 |2005年第1期|831-834|共4页
作者
Lan Zhao; Daoli Zhang; Gang DuJianmei XuDonxian Zhou;
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作者单位

MOE Engineering Research Centre for Functional Ceramics, Department of Electronic Science and Technology, Huazhong University of Science and Technology, No. 1037 Luoyu Road Hongshan District Wuhan City Hubei Province P. R. China 430074;

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正文语种英语
中图分类工程基础科学;
关键词
thin films; sol-gel approach; antimony-doped tin oxide;

The Properties of Antimony-doped Tin Oxide Thin Films by the Sol-Gel Approach

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