A high energy focused ion beam microprobe using a doublet arrangement of short magnetic quadrupole lenses was used to focus 1-3 MeV protons to spot sizes of 1 x 1 mu m(2) and 1-4.5 MeV carbon and silicon ion beams to spot sizes of 1.5 x 1.5 mu m(2). The results presented clearly demonstrate that this simple doublet configuration can provide high energy microbeams for microananalysis and microfabrication applications. (C) 2008 American Institute of Physics.
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