Optical waveguides have been formed by heliumhyphen;ion implantation in KTaO3. The implantation forms a confinement barrier near the projected range of the ion by decreasing the refractive index as much as 16percnt; for ion doses of 4times;1016ions/cm2. This is the highest refractivehyphen;index change yet reported for ionhyphen;implanted crystalline planar waveguides. Guiding modes (with moderately low loss) are produced without the need for annealing out of color centers. During annealing studies, the index change reduces during an anneal stage near 400thinsp;deg;C, but waveguiding is maintained even after anneals to 900thinsp;deg;C. Loss measurements indicate a planarhyphen;waveguide loss of 1 dB/cm after a 400thinsp;deg;C anneal.
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