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Quasi-periodic nanostructures grown by oblique angle deposition

机译:Quasi-periodic nanostructures grown by oblique angle deposition

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摘要

We report that tungsten nanocolumns grown by oblique angle sputter deposition develop a quasi-periodic morphology which is not observed for continuous films deposited at normal incidence. The maximum position in power spectral density of the quasi-periodic nanostructures decreases exponentially as a function of thickness. We explain the formation of the quasi-periodic nature by a "shadowing length" concept which plays a similar role to conventional surface diffusion length. Also, we show that the change of the spatial frequency of the periodicity is a result of the elimination of shorter columns due to the shadowing effect during growth.

著录项

  • 来源
    《Journal of Applied Physics》 |2003年第12期|7723-7728|共6页
  • 作者单位

    Department of Physics, Applied Physics and Astronomy, Rensselaer Polytechnic Institute, Troy, New York 12180-3590;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 英语
  • 中图分类 应用物理学;
  • 关键词

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