The effects of film lead content on the fatigue and imprintproperties of (Pb, La)(Zr, Ti)O3 (PLZT) capacitors were investigated.The PLZT films were grown on Pt/IrO2 bottom electrodes using sol- gelmethod. PLZT films with higher lead content tended to be superior infatigue properties, and to be inferior in imprint properties.Consequently, a trade-off relation between fatigue and imprint withlead content was found. In case of low lead content, the results ofTEM observation suggested that there were many defects arising fromlead deficiency at the electrode/PLZT interface.
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