Development of Full-Reversed Bending Fatigue Tester Based on AFM Technique for Cyclic Damage Evaluation of MEMS

Yoshitada Isono; Takanori Kikuchi; Hiroaki Kitoh

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Development of Full-Reversed Bending Fatigue Tester Based on AFM Technique for Cyclic Damage Evaluation of MEMS

机译：Development of Full-Reversed Bending Fatigue Tester Based on AFM Technique for Cyclic Damage Evaluation of MEMS

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摘要

A novel full-reversed bending fatigue tester was developed for cyclic fatigue damage evaluation of MEMS materials. This paper focuses on; 1) the design of the micro fatigue tester; 2) establishment of the bending fatigue testing procedure; and 3) revealing fatigue lives of microscale single crystal silicon (SCS) specimens. In fatigue testing, a microscale SCS specimen was reciprocated between the twin thick-cantilevers to induce tensile and compressive stresses at both fixed ends of the specimen, respectively. The twin cantilevers played two roles; one is as an indenter for bending and the other as a detector of cyclic loads applied to the specimen. The bending loads were measured by the deflection of the twin cantilevers using a laser reflection system based on an AFM technique. This research succeeded in obtaining elastic hysteresis loops of the maximum stress-strain relation for the SCS specimens.

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来源
《Key engineering materials》 |2005年第1期|567-573|共7页
作者
Yoshitada Isono; Takanori Kikuchi; Hiroaki Kitoh;
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作者单位

Department of Micro System Technology, Ritsumeikan University, Kusatsu, Shiga, Japan;

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原文格式 PDF
正文语种英语
中图分类工程基础科学;
关键词
fatigue damage; cyclic bending test; atomic force microscope; silicon; cantilever;

Development of Full-Reversed Bending Fatigue Tester Based on AFM Technique for Cyclic Damage Evaluation of MEMS

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