机译:Real-time monitoring of the silicidation process of tungsten filaments at high temperature used as catalysers for silane decomposition
Univ Barcelona;
Chemical vapour deposition (CVD); Nucleation; Raman spectroscopy and scattering; Electrical conductivity; CHEMICAL-VAPOR-DEPOSITION; SILICON THIN-FILMS; HOT-WIRE CVD; GROWTH-KINETICS; SUBSTRATE; CATALYZER;