Sub-50-nm wide slot waveguides with good optical isolation on silicon on insulator

Huang Zengzhi; Xia Jinsong

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Sub-50-nm wide slot waveguides with good optical isolation on silicon on insulator

机译：Sub-50-nm wide slot waveguides with good optical isolation on silicon on insulator

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摘要

Although slot waveguide structures are widely used in all kinds of optical devices, very few articles focus on the issue of optical isolation of slot waveguides. This article, in an effort to bridge the gap in the available literature, focuses on the aspect of optical isolation of slot waveguides and provides definitive rules for application of different slot waveguides in dense integration of optical links. A slot waveguide with a 48-nm-wide slot was fabricated with electron beam lithography and inductively coupled plasma etching. (C) 2016 Society of Photo-Optical Instrumentation Engineers (SPIE)

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来源
《Optical Engineering》 |2016年第8期|087102-1-087102-4|共4页
作者
Huang Zengzhi; Xia Jinsong;
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作者单位

Huazhong Univ Sci & Technol, Sch Opt & Elect Informat, Luoyu Rd 1037, Wuhan 430074, Peoples R China;

Huazhong Univ Sci & Technol, Wuhan Natl Lab Optoelect, Luoyu Rd 1037, Wuhan 430074, Peoples R China;

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);
原文格式 PDF
正文语种英语
中图分类计量学;光学仪器;
关键词
integrate optics; silicon photonics; slot waveguide; directional coupler;

Sub-50-nm wide slot waveguides with good optical isolation on silicon on insulator

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