Estimation of the convergence order of rigorous coupled-wave analysis for binary gratings in optical critical dimension metrology

Shiyuan Liu; Yuan Ma; Xiuguo ChenChuanwei Zhang

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Estimation of the convergence order of rigorous coupled-wave analysis for binary gratings in optical critical dimension metrology

机译：Estimation of the convergence order of rigorous coupled-wave analysis for binary gratings in optical critical dimension metrology

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In most cases of optical critical dimension metrology, when applying rigorous coupled-wave analysis to optical modeling, a high order of Fourier harmonics is usually set up to guarantee the convergence of the final results. However, the total number of floating point operations grows dramatically as the truncation order increases. Therefore, it is critical to choose an appropriate order to obtain high computational efficiency without losing much accuracy in the meantime. We show that the convergence order associated with the structural and optical parameters is estimated through simulation. The results indicate that the convergence order is linear with the period of the sample when fixing the other parameters, both for planar diffraction and conical diffraction. The illuminated wavelength also affects the convergence of a final result. With further investigations concentrated on the ratio of illuminated wavelength to period, it is discovered that the convergence order decreases with the growth of the ratio, and when the ratio is fixed, convergence order jumps slightly, especially in a specific range of wavelength. This characteristic could be applied to estimate the optimum convergence order of given samples to obtain high computational efficiency.

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来源
《Optical Engineering》 |2012年第8期|081504-1-081504-7|共7页
作者
Shiyuan Liu; Yuan Ma; Xiuguo ChenChuanwei Zhang;
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作者单位

Huazhong University of Science and Technology State Key Laboratory of Digital Manufacturing Equipment and Technology Wuhan 430074, China;

Huazhong University of Science and Technology, Wuhan National Laboratory for Optoelectronics Wuhan 430074, China;

Huazhong University of Science and Technology Wuhan National Laboratory for Optoelectronics Wuhan 430074, China;

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);
原文格式 PDF
正文语种英语
中图分类计量学;
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Estimation of the convergence order of rigorous coupled-wave analysis for binary gratings in optical critical dimension metrology

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