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Retroreflective grating analysis versus physical measurements of surface contour

机译:Retroreflective grating analysis versus physical measurements of surface contour

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摘要

The technique of retroreflective grating analysis is presented to measure surface contour. This noncontacting optical method can de-tect a dent with maximum depth less than 10 μm. A comparison with some physical measuring systems indicates that it has advantage over such contacting measurements, especially for specular surfaces.#1998 Society of Photo-Optical Instrumentation Engineers. S0091-3286(98)03105-5 Subject terms: retrorefiection; grating analysis; noncontact measurement;surface contour. Paper 13107 received Oct. 14, 1997; revised manuscript received Dec.10,1997; accepted for publication Dec. 11, 1997.

著录项

  • 来源
    《Optical Engineering》 |1998年第6期|1464-1467|共4页
  • 作者

    Xianzhu Zhang; Walter P. North;

  • 作者单位

    University of Windsor Department of Mechanical and Materials Engineering /401 Sunset Avenue Windsor, Ontario N9B 3P4 Canada;

    University of Windsor Department of Mechanical and Materials Engineering/ 401 Sunset Avenue Windsor, Ontario N9B 3P4 Canada;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 英语
  • 中图分类 光学仪器;
  • 关键词

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