首页>
外文期刊>Review of Scientific Instruments
>Improving the electrical performance of a conductive atomic force microscope with a logarithmic current-to-voltage converter
【24h】
Improving the electrical performance of a conductive atomic force microscope with a logarithmic current-to-voltage converter
展开▼
机译：Improving the electrical performance of a conductive atomic force microscope with a logarithmic current-to-voltage converter
A new configuration of conductive atomic force microscope (CAFM) is presented, which is based in a standard CAFM where the typical I-V converter has been replaced by a log I-V amplifier. This substitution extends the current dynamic range from 1-100 pA to 1 pA-1 mA. With the broadening of the current dynamic range, the CAFM can access new applications, such as the reliability evaluation of metal-oxide-semiconductor gate dielectrics. As an example, the setup has been tested by analyzing breakdown spots induced in SiO_(2) layers.
展开▼
