We have designed and constructed an apparatus that combines hyperthermal energy ion scattering (100 eV) with lowhyphen;energy ion scattering (a few hundred eV to several keV). The UHV scattering chamber possesses a full range of sample preparation and characterization capabilities, including LEED, Auger spectroscopy, a Kelvin probe for work function measurements, and facilities for gas or alkalihyphen;metal deposition. The differentially pumped beamline provides wellhyphen;collimated, monoenergetic beams of gas or alkalihyphen;metal ions ranging in energy from 10 eV to 10 keV. To illustrate the qualitative changes in the scattering behavior observed over this range, we present experimental results for Na+scattered off the Cu(110) surface with the incident ion energy ranging from 56 eV to 4 keV. We also show a comparison between 1 keV K+and 1 keV Ar+scattered from the same surface.
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