Low-magnification polarization phase-shifting interference microscope for three-dimensional profilometry

Nandini Ghosh; Sanjukta Sarkar; Kallol Bhattacharya

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Low-magnification polarization phase-shifting interference microscope for three-dimensional profilometry

机译：Low-magnification polarization phase-shifting interference microscope for three-dimensional profilometry

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摘要

An interferometric technique for three-dimensional phase measurement of optically transparent microscopic phase samples is presented. An obliquely aligned polarizer-masked cube beam-spiitter, an infinity-corrected microscope objective, and a couple of simple polarization phase-shifting components serve as the setup for such a measurement. Surface phase profiles are then extracted using standard phase-shifting algorithms. The salient features of the proposed technique are its simple design, in-line configuration, possibility of integration with standard microscopic systems, and inherent compensation of the substrate phase. Experimental results are presented. The overall lateral magnification is restricted due to the low numerical aperture offered by the microscope objective and cube beam-splitter combination.

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来源
《Optical Engineering》 |2012年第8期|085601-1-085601-6|共6页
作者
Nandini Ghosh; Sanjukta Sarkar; Kallol Bhattacharya;
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作者单位

University of Calcutta, Department of Applied Optics and Photonics 92, Acharya Prafulla Chandra Road Kolkata 700009, India;

University of Calcutta, Department of Applied Optics and Photonics 92, Acharya Prafulla Chandra Road, Kolkata 700009, India;

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);
原文格式 PDF
正文语种英语
中图分类计量学;
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Low-magnification polarization phase-shifting interference microscope for three-dimensional profilometry

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