Holographic microscopy for the simultaneous interferometric determination of all displacement components is described. The recording and the evaluation procedures are optimized by three illumination directions and conjugate reconstruction, respectively. Microscopic observation Is completely separated from holographic recording. The holographic microscope performs maximum flexibility of magnification combined with high imaging accuracy. The phase-shift technique and Fourier analysis with a carrier frequency are applied for interferogram evaluation. Both methods are compared regarding the measurement range, accuracy, and handling. In-plane and out-of-plane displacement components can be measured simultaneously by both evaluation methods.A cantilever beam, a circular plate, and a surface-mounted microresistor are used to demonstrate the capabilities of the holographic microscope. #1997 Society of Photo-Optical Instrumentation Engineers. S0091-3286(97)02509-0 Subject terms: holographic microscopy; holographic interferometry;three-dimensional displacement measurement; conjugate reconstruction. Paper 38126 received Dec. 30, 1996; revised manuscript received Apr. 18,1997; accepted for publication Apr. 19, 1997.
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