Low-temperature formation of perovskite PbTiO3 films by O-2 cluster ion-assisted deposition

Akizuki M.; Qin W.; Aoki T.Harada M.Ogasawara S.Yodoshi K.Yamada I.Matsuo J.

首页> 外文期刊>Materials Chemistry and Physics >Low-temperature formation of perovskite PbTiO3 films by O-2 cluster ion-assisted deposition

【24h】

Low-temperature formation of perovskite PbTiO3 films by O-2 cluster ion-assisted deposition

机译：Low-temperature formation of perovskite PbTiO3 films by O-2 cluster ion-assisted deposition

获取原文

获取原文并翻译 | 示例

掌桥外文数据库（机构版） >>

开具论文收录证明 >>

文献代查 >>

页面导航

摘要
著录项
相关主题

摘要

The formation of PbTiO3 films on Pt films using O-2 cluster ions, Pb and Ti(i-OC3H7)(4), was examined. Perovskite-PbTiO3 films could be formed at a substrate temperature of 400 degrees C, which was about 100 degrees C lower than that which is possible with CVD and sol-gel methods. An acceleration energy of 1 keV was sufficient to form the perovskite structure. These films were obtained owing to a high oxidant Aux to the surface and high-density energy deposition during growth. Another feature of the O-2 cluster ion assisted deposition was that no pyrochlore structure was observed at lower substrate temperatures. This might be due to surface reactions in the high vacuum (3 X 10(-5) Torr). (C) 1998 Elsevier Science S.A. All rights reserved. References: 13

著录项

来源
《Materials Chemistry and Physics》 |1998年第3期|255-257|共3页
作者
Akizuki M.; Qin W.; Aoki T.Harada M.Ogasawara S.Yodoshi K.Yamada I.Matsuo J.;
展开▼
作者单位

Kyoto Univ, Ion Beam Engn Expt Lab, Sakyo Ku, Kyoto 60601, Japan, .;

bh.med.kyoto-u.ac.jp;

展开▼
收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
原文格式 PDF
正文语种英语
中图分类工程材料学;工程基础科学;
关键词
Gas cluster ion; Perovskite films; Oxygen; Chemical-vapor-deposition; Thin-films; Beams;

Low-temperature formation of perovskite PbTiO3 films by O-2 cluster ion-assisted deposition

摘要

著录项

相关主题

期刊订阅