Holographic microscope for measuring displacements of vibrating microbeams using time-averaged, electro-optic holography

Gordon C. Brown; Ryszard J. Pryputniewicz

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Holographic microscope for measuring displacements of vibrating microbeams using time-averaged, electro-optic holography

机译：Holographic microscope for measuring displacements of vibrating microbeams using time-averaged, electro-optic holography

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An optical microscope, utilizing the principles of time-averaged hologram interferometry, is described for microelectrome-chanical systems (MEMS) applications. MEMS are devices fabricated via techniques such as microphotolithography to create miniature actuators and sensors. Many of these sensors are currently deployed in automotive applications which rely on, or depend on, the dynamic behavior of the sensor, e.g., airbag sensors, ride monitoring suspensions sensors, etc. Typical dimensions of current MEMS devices are measured in micrometers, a small fraction of the diameter of a human hair,and the current trend is to further decrease the size of MEMS devices to submi-crometer dimensions. However, the smaller MEMS become,the more challenging it is to measure with accuracy the dynamic characteristics of these devices. An electro-optic holographic microscope(EOHM)for the purpose of studying the dynamic behavior of MEMS type devices is described. Additionally, by performing phase measurements within an EOHM image, object displacements are determined as illustrated by representative examples. With the EOHM, devices with surface sizes rang-ing from approximately 35×400 to 5×18μm are studied while undergo-ing resonant vibrations at frequencies as high as 2 MHz.#1998 Society of Photo-Optical Instrumentation Engineers. S0091-3286(98)00505-4 Subject terms: microelectromechanical systems; electro-optic holographic microscope; microscopic holography; electro-optic holography; microsensors;hybrid methods; automotive applications. Paper CAR-05 received Nov. 10, 1997; accepted for publication Des.5,1997.

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《Optical Engineering》 |1998年第6期|1398-1405|共8页
作者
Gordon C. Brown; Ryszard J. Pryputniewicz;
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Worcester Polytechnic Institute Center for Holographic Studies and Laser μmechaTronics Mechanical Engineering Department Worcester,/ Massachusetts 01609-2280 E-mail gcbrown @wpi.edu;

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);
原文格式 PDF
正文语种英语
中图分类光学仪器;
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Holographic microscope for measuring displacements of vibrating microbeams using time-averaged, electro-optic holography

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