Experimental and numerical investigation of the surface reliefs formed on a moving silicon substrate by pulses of a Gaussian laser

Wee TS.; Chim WK.; Lu YF.

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Experimental and numerical investigation of the surface reliefs formed on a moving silicon substrate by pulses of a Gaussian laser

机译：Experimental and numerical investigation of the surface reliefs formed on a moving silicon substrate by pulses of a Gaussian laser

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When pulses of a Gaussian laser beam with sufficient energy intensity are applied on to the surface of a moving substrate, interesting surface reliefs can be formed at the spots where the beam strikes the substrate. In this paper, experimental findings of such laser-induced melt reliefs formed on the surface of a silicon substrate using laser pulses from a CW Ar+ laser are reported. The dependence of the size of the reliefs on parameters such as the power of the laser beam and the speed at which the substrate moves under the laser irradiation are investigated. A numerical finite element routine has also been developed to model the laser melting problem. With the help of the melting model, attempts to deduce the formation of these melt reliefs have been carried out. (C) 1998 Elsevier Science S.A. All rights reserved. References: 7

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《Materials Chemistry and Physics》 |1998年第3期|205-209|共5页
作者
Wee TS.; Chim WK.; Lu YF.;
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作者单位

Natl Univ Singapore, Fac Engn, Ctr Integrated Circuit Failure anal & Reliabil, 10 Kent Ridge Crescent, Singapore 119260, Singapore.;

bh.med.kyoto-u.ac.jp;

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
原文格式 PDF
正文语种英语
中图分类工程材料学;工程基础科学;
关键词
Laser-induced melt relief; Pulsed laser melting; Numerical laser melting model; Laser induced temperature profile; Silicon; Steady-state;

Experimental and numerical investigation of the surface reliefs formed on a moving silicon substrate by pulses of a Gaussian laser

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