A method for rapid alignment of laser beams in optical systems is presented. It employs a Seward alignment module (SAM) to qualify both the spatial position and angular direction of the beam. Alignment procedures for turning mirrors and laser mounts are described. Application of the SAM on two complex laser-etching systems is presented. # 1997 Society of Photo-Optical Instrumentation Engineers. S0091-3286(97)03205-4 Subject terms: laser alignment; laser ablate; laser drill; laser -etching systems is pre-laser weld; laser mark. Paper 16096 received Sep. 13, 1996; revised manuscript received Dec.16,1996; accepted for publication Dec. 16, 1996.
展开▼