A pinhole camera with an x-ray sensitive charge-coupled device array was used to analyze x-rays emitted from an electron cyclotron resonance (ECR) discharge. The camera was operated at a temperature of 140 K, allowing single photon detection at integration times up to several hours. This technique simultaneously allows spectroscopic investigations as well as x-ray imaging. Thus, the geometrical size and x-ray emission profiles from an ECR plasma were measured. (C) 1996 American Institute of Physics. References: 7
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