Sequential reactions of SiD0ndash;3+and Si2D0ndash;6+with 10minus;7ndash;10minus;6Torr of disilane are described. The reactions proceed, with few exceptions, by addition of SiD2with simultaneous loss of SiD4. The growing cluster cations decrease in reactivity with increasing size. For all reaction sequences, a terminal cluster size is reached that contains fewer than nine silicon atoms. Based on our results, we conclude that the reaction of small subsilane or disilane cations with disilane does not lead to gas phase particle formation in disilane plasmas.
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