The utilization of micro-optical components in systems for optical-beam deflection and modulation offers the possibility for realization of miniaturized switches and scanners. As the required displacement of the micro-optical components for efficient beam manipulation is quite small, high-speed actuators with small electrical power consumption can be used. We present a variety of micro-optical configurations and discuss their potential for the creation of different types of miniaturized scanners and switches. The combination of micro-optical components already available and semiclassical piezoelectric actuators leads to new types of switching and modulation systems for a very broad spectrum of applications. # 1997 Society of Photo-Optical Instrumentation Engineers. SOO91-3286(97)00205-5 Subject terms: micro-opto-electro-mechanical systems; micro-optics; optical scanners, micro-optical switches; piezoelectric actuators, Paper MEM-02 received Sep. 24, 1996; revised manuscript received Jan. 8, 1997; accepted for publication Jan. 12, 1997.
展开▼
