An 18 GHz electron cyclotron resonance ion source for multiply charged ions was constructed and is now in operation. A new distribution of the mirror field was adopted, and minimum strength is varied by a solenoid coil installed between the mirror coils. The measured mirror field distribution is close to the designed distribution and its maximum strength exceeds 1.4 T. The source is now being tuned by use of Ar ion generation. The relatively high base pressure in the plasma chamber has been improved by installing an additional vacuum pump. The source performance has been maturing gradually with the vacuum and Ar ions with charge states of up to 13+ have been observed so far. (C) 1996 American Institute of Physics. References: 10
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