Use of micro-electro-mechanical deformable mirrors to control aberrations in optical systems: theoretical and experimental results

Michael C. Roggeman; Victor M. Bright; Byron M. Welsh

首页> 外文期刊>Optical Engineering >Use of micro-electro-mechanical deformable mirrors to control aberrations in optical systems: theoretical and experimental results

【24h】

Use of micro-electro-mechanical deformable mirrors to control aberrations in optical systems: theoretical and experimental results

机译：Use of micro-electro-mechanical deformable mirrors to control aberrations in optical systems: theoretical and experimental results

获取原文

获取原文并翻译 | 示例

掌桥外文数据库（机构版） >>

开具论文收录证明 >>

文献代查 >>

页面导航

摘要
著录项
相关主题

摘要

Micro-electro-mechanical deformable mirrors (MEM-DMs) are solid-state electronic devices with small, movable reflective surface elements that can be used to manipulate the phase of optical wavefronts. MEM-DMs differ from more conventional continuous-facesheet deform-able mirrors in that the movable surface of a MEM-DM consists of a set of segmented moving surfaces. The segmented, reflective surfaces of a MEM-DM give rise to larger diffraction effects than those provided by continuous-facesheet deformable mirrors. However, MEM-DMs are still attractive due to their low cost and the low drive voltages. We explore the theoretical limits of performance of MEM-DMs for controlling fixed aberrations in optical systems, and we present laboratory results demonstrating reduction of a fixed aberration using a MEM-DM device. Results presented here show that while a MEM-DM does provide some degree of aberration control, diffraction effects arising from the static support structures of the MEM-DM surface are significant. An alternative design that uses a lenslet array in conjunction with the MEM-DM is shown through theoretical studies to provide superior aberration correction with lower residual effects due to diffraction. # 1997 society of Photo-Optical Instrumentation Engineers. S0091-3286(97)00705-8 Subject terms: micro-opto-electro-mechanical systems; deformable mirrors; aberration control. Paper MEM-07 received Oct. 29, 1996; revised manuscript accepted for publication Jan. 14, 1997.

著录项

来源
《Optical Engineering》 |1997年第6期|1326-1338|共13页
作者
Michael C. Roggeman; Victor M. Bright; Byron M. Welsh;
展开▼
作者单位

Air Force Institute of Technology Graduate School of Engineering Department of Engineering Physics/ 2950 P. Street Wright-Patterson Air Force Base, Ohio 45433-7765;

Air Force Institute of Technology Graduate School of. Engineering Department of Electrical and Computer Engineering/ 2950P;

Street Wright-Patterson Air Force Base, Ohio 45433-7765;

展开▼
收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);
原文格式 PDF
正文语种英语
中图分类光学仪器;
关键词

Use of micro-electro-mechanical deformable mirrors to control aberrations in optical systems: theoretical and experimental results

摘要

著录项

相关主题

期刊订阅