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>Determination of the interface charge between an epilayer and a substrate using capacitancehyphen;voltage measurements
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Determination of the interface charge between an epilayer and a substrate using capacitancehyphen;voltage measurements
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机译:Determination of the interface charge between an epilayer and a substrate using capacitancehyphen;voltage measurements
A method is presented for the measurement of the interface charge between an epitaxial layer and a substrate. Capacitancehyphen;voltage characteristics of Schottky contacts formed on the epilayer are measured and analyzed. The interface charge is determined by the modified builthyphen;in potential and capacitance. Experimental results are reported forphyphen;type CdTe epilayers grown by metalorganic chemical vapor deposition on aphyphen;type CdTe substrate using indium contacts.
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