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convenient method for calibrating nonlinear phase modulators for use in phaseshifting interferometry

机译:convenient method for calibrating nonlinear phase modulators for use in phaseshifting interferometry

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摘要

A method to calibrate a nonlinear phase modulator is described that is based on the minimization of a function obtained from a sequence of interferometric images. The method is equally applicable to smooth wavefront and speckled wavefront interferometry, allowing convenient in situ calibration for a wide range of interferometer configurations. The main advantage over previous calibration methods is that both the linear and quadratic phase variation terms are measured. The performance of the proposed method is verified by experiments in which the phase shift is determined independently by a Fourier transform method. # 1998 Society of Photo-Optical Instrumentation Engineers. S0091-3286(98)02709-3 Subject terms: Calibration; piezoelectric translator; phase-shifting interferometry; phase modulator. Paper 42107 received Oct. 28, 1997; revised manuscript received Mar. 20, 1998; accepted for publication Mar. 23, 1998.

著录项

  • 来源
    《Optical Engineering》 |1998年第9期|2501-2505|共5页
  • 作者单位

    Centro de Inverstigaciones en Optica, A.C./ Apartado Postal 1-948 Leon, Gto., Mexico E-mail: alon@foton.cio.mx;

    Loughborough University Department of Mechanical Engineering/ Loughborough LE11 3TU United Kingdom;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 英语
  • 中图分类 光学仪器;
  • 关键词

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