Growth and Characterization of High Quality MgO Thin Films by Ultrasonic Spray Pyrolysis

Jiming Bian; Xiaomin Li; Xiangdong GaoWeidong Yu

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Growth and Characterization of High Quality MgO Thin Films by Ultrasonic Spray Pyrolysis

机译：Growth and Characterization of High Quality MgO Thin Films by Ultrasonic Spray Pyrolysis

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Ultrasonic spray pyrolysis has been applied to deposit MgO thin films on Si(100) and quartz glass substrate. The microstructures and properties of the as-grown MgO thin films were examined by X-ray diffraction, scanning electron microscopy, spectrophotometer and semiconductor resistivity meter. The results indicates that the MgO thin films deposited under optimal conditions shows smooth and dense surface without visible pores or defects over the substrate, and as well as good thickness uniformity. Almost completely (100)-oriented MgO films with the transmission higher than 90 in UV/VIS region and the resistivity at least in the order of 10~7Ωcm were obtained. MgO thin film with such a crystal quality seems to be very suitable for acting as a buffer layer for the subsequent epitaxial growth of films.

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来源
《Key engineering materials》 |2005年第2期|1171-1174|共4页
作者
Jiming Bian; Xiaomin Li; Xiangdong GaoWeidong Yu;
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作者单位

State Key Laboratory of High Performance Ceramics and Superfine Microstructures, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, China;

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正文语种英语
中图分类工程基础科学;
关键词
MgO thin film; ultrasonic spray pyrolysis; growth mechanism;

Growth and Characterization of High Quality MgO Thin Films by Ultrasonic Spray Pyrolysis

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