All-optical probing of material structure by second-harmonic generation: application to piezoelectric aluminum nitride thin films

Danièle Blanc; Alain Cachard; Jean-Claude Pommier

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All-optical probing of material structure by second-harmonic generation: application to piezoelectric aluminum nitride thin films

机译：All-optical probing of material structure by second-harmonic generation: application to piezoelectric aluminum nitride thin films

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Second-harmonic generation can be used to probe the micro-structure of materials. This nondestructive all-optical method is applied to quantify the orientation of the aluminum nitride microcolumns. Theoretical results show that very small tilt angles of the columns are easily detectable. The sensitivity of this technique is confirmed by experimental results, which are compared with piezoelectric measurements. # 1997 Society of Photo-Optical Instrumentation Engineers. S0091-3286(97)01104-5 Subject terms: thin film characterization; optical diagnostic; second-harmonic generation; piezoelectricity. Paper 30076 received July 27, 1996; revised manuscript received Nov. 2, 1996; accepted for publication Nov. 5, 1996. This paper is a revision of a paper .presented at the SPIE conference on Optical Inspection and Micromeasurements, June 1996, Besancon, France. The paper presented there appears (unreferred) in SPIE Proceedings Vo!. 2782.

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《Optical Engineering》 |1997年第6期|1191-1195|共5页
作者
Danièle Blanc; Alain Cachard; Jean-Claude Pommier;
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Université Jean Monnet Laboratoire Traitement du Signal et Instrumentation /UMR CNRS 5516 23 rue du Dr. P. Michelon 42023 Saint-Etienne Cedex2, France E-mail: blanc @ univ-st-etienne. fr;

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);
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正文语种英语
中图分类光学仪器;
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All-optical probing of material structure by second-harmonic generation: application to piezoelectric aluminum nitride thin films

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