Surface Morphology, Crystal Orientation and Scratch Properties of Au/NiCr/Ta Multi-layered Metallic Films

Wu TANG; Longjiang DENG; Kewei XUJian LU

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Surface Morphology, Crystal Orientation and Scratch Properties of Au/NiCr/Ta Multi-layered Metallic Films

机译：Surface Morphology, Crystal Orientation and Scratch Properties of Au/NiCr/Ta Multi-layered Metallic Films

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The crystal orientation, surface morphology, surface roughness and scratch properties of Au/NiCr/Ta multi-layered metallic films was examined by X-ray diffraction (XRD), atomic force microscopy (AFM) and a scratch test method, respectively. It was clarified that the surface morphology and surface roughness depend on the substrate temperature. The surface roughness decreases from 4.259nm to 2.935nm when substrate temperature changed from 100℃ to 180℃, and then increases when substrate temperature above 180℃. The XRD revealed that there are only Au diffraction peaks with highly textured having a Au-(111) or a mixture of Au-(111) and Au-(200) orientation. The micro-scratch test reveals that both modes can be used for conventionally critical load determination, but the friction mode can additionally reflect the changes at different metallic film layers, the critical characteristic load was not sensitive to substrate temperature.

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来源
《Key engineering materials》 |2007年第3期|1863-1866|共4页
作者
Wu TANG; Longjiang DENG; Kewei XUJian LU;
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作者单位

State Key Laboratory of Electronic Thin Films and Integrated Devices University of Electronic Science and Technology of China, Chengdu, 610054, China;

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正文语种英语
中图分类工程基础科学;
关键词
crystal orientation; surface roughness; scratch test; metallic films;

Surface Morphology, Crystal Orientation and Scratch Properties of Au/NiCr/Ta Multi-layered Metallic Films

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