A novel process for fabrication of single crystal it ported torsional micromirrors with large dimensions (300×240) is presented. The mirrors consist of a sputtered aluminum film on a layer of supporting Oxide mounted on fully suspended single crystal silicon grids. The grids have an aspect ratio of 7:1 to provide a stiff backbone and to ensure flatness of the mirror surface. Thus the minors do not bend due to the internal stresses. A new idea of actuation of torsional structures is also presented. Vertical near-comb type actuators were fabricated to drive the torsional structures, # 1997 Society of Photo-Optical Instrumentation En- gineers. S0091-3286(97)01405-0 Subject terms: micro-opto-electro-mechanical systems; micromirrors; vertical ac-tuators; planarization; mechanical polishing; single crystal silicon; single crystal silicon reactive etching and metallization. Paper MEM-11 received Nov. 12, 1996; revised manuscript 1997; accepted for publication Feb. 4, 1997.
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Comell University School of Electrical Engineering and Cornell Nanofabrication Facility/ Ithaca, New York 148.53-5401 E-mail: jyao @ dlep 1.itg.ti.com;
