This types of vacuum are ion source provides the generation of ions of various gases and metals. A specific feature of these ion sources is the use of two cold-cathode are discharges to produce plasma for the extraction of ion beams. Metal ions are generated by means of a vacuum are in the metal vapor produced by cathode spots. Gas ions are generated by a constricted low-pressure are discharge. In this paper we discuss the problem as follows: the production of broad beams by extracting ions from the anode cavity in the transverse direction and the initiation of a vacuum are cathode spot by an auxiliary discharge in a strong magnetic field. (C) 1996 American Institute of Physics. References: 9
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