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>Computer automation of the Pulse Reactor, a pulse operated lowhyphen;pressure metal organic vapor phase epitaxy machine
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Computer automation of the Pulse Reactor, a pulse operated lowhyphen;pressure metal organic vapor phase epitaxy machine
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机译：Computer automation of the Pulse Reactor, a pulse operated lowhyphen;pressure metal organic vapor phase epitaxy machine
A modular and thereby flexible software package has been developed to control and operate a recently designed Pulse Reactor, a new type of lowhyphen;pressure metal organic vapor phase epitaxy (MOVPE) machine. The userhyphen;friendly software package allows the operator to grow complicated layer structures automatically, whereby the composition of the growth mixture for each growth pulse can be varied. The hardware consists of a VMEbus based microcomputer system in combination with a UNIFIVE lsqb;derived from UNIXsquflg; system V (UNIXsquflg; is a trademark of ATamp;T Bell Laboratories)rsqb; operating system. Interfacing with the reactor system is performed through the use of a Philips MIOS subsystem. The UNIFIVE operating system is modified so as to establish good realhyphen;time behavior. Multilayer structures consisting of several GaAs and AlGaAs layers have been grown with good results, demonstrating not only the reliability, the real time behavior, and the correctness of the software package, but also the quality of the Pulse Reactor itself.
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