Accurate measurements at interferometric ellipsometer

Galina A. Lysenko; Alexander V. Krioukov; Yuri Y. KachurinVitaly V. Pogodaev

首页> 外文期刊>Optical Engineering >Accurate measurements at interferometric ellipsometer

【24h】

Accurate measurements at interferometric ellipsometer

机译：Accurate measurements at interferometric ellipsometer

获取原文

获取原文并翻译 | 示例

掌桥外文数据库（机构版） >>

开具论文收录证明 >>

文献代查 >>

页面导航

摘要
著录项
相关主题

摘要

It is known that the beamsplitter in interference ellipsometers is one of the possible sources of inaccuracy. In the general case, the polarizing effect of the beamsplitter adds systematic error to measurement results. Moreover, accurate measurements require such preliminary steps as precise determination of test specimen polarization axes and their alignment relative to the ellipsometer axes. We propose a new retardance measurement method that is free from these disadvantages. This becomes possible due to specimen rotation around the axis and constant interference signals tracking.

著录项

来源
《Optical Engineering》 |2006年第2期|023605-1-023605-5-0|共5页
作者
Galina A. Lysenko; Alexander V. Krioukov; Yuri Y. KachurinVitaly V. Pogodaev;
展开▼
作者单位

Moscow State Technical University n.a. Bauman Optoelectronic Devices for Research Chair Devyatogo Maya str, 28-8, 105173 Moscow, Russian Federation;

展开▼
收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);
原文格式 PDF
正文语种英语
中图分类光学仪器;
关键词
ellipsometry; retarders; phase modulation; phase measurement; polarization; optical properties;

Accurate measurements at interferometric ellipsometer

摘要

著录项

相关主题

期刊订阅