We report a new magnetic MEMS technology that enables many electromagnetic MEMS devices. This new technology combines magnetic thin films and silicon bulk micromachining. Its use is demonstrated by two types of millimeter-sized analog scanning mirrors that are capable of delivering deflection angles exceeding 60 deg. Details include the design, fabrication, operation, as well as a complete electromechanical model of the mirrors. In addition, the use of the mirrors is further manifested in a holographic data storage system where hundreds of holograms have been successfully stored and retrieved. # 1997 Society of Photo-Optical Instrumentation Engineers. S0091-3286(97)01005-2 Subject terms: micro-opto-electro-mechanical systems; electromagnetic actuation; laser scanning mirror; holographic data storage; permalloy. Paper MEM-10 received Nov. 8, 1996; revised manuscript received Jan. 14, 1997; accepted for publication Jan. 24, 1997.
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