Photoinduced microchannels and element change inside silicon by femtosecond laser pulses

Yuncan Ma; Haitao Shi; Jinhai SiTao ChenFei YanFeng ChenXun Hou

首页> 外文期刊>Optics Communications: A Journal Devoted to the Rapid Publication of Short Contributions in the Field of Optics and Interaction of Light with Matter >Photoinduced microchannels and element change inside silicon by femtosecond laser pulses

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Photoinduced microchannels and element change inside silicon by femtosecond laser pulses

机译：飞秒激光脉冲的光生微通道和硅内部元素变化

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摘要

Microchannels are fabricated inside silicon along the direction of laser beam by a femtosecond laser at 800 nm, which is located at the absorption region of silicon. Formation mechanism of the microchannels is attributed to spherical aberration. The element change in surrounding of the microchannel is characterized, and results show that oxygen is incorporated into silicon after irradiation. The origin of the oxygen incorporation and the laser intensity dependence of the amount of oxygen are discussed, respectively.

机译：微通道是通过位于硅吸收区域的 800 nm 飞秒激光器沿激光束方向在硅内部制造的。微通道的形成机制归因于球面像差。对微通道周围元素的变化进行了表征，结果表明，辐照后硅中掺入了氧。分别讨论了氧掺入的起源和氧量的激光强度依赖性。

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来源
《Optics Communications: A Journal Devoted to the Rapid Publication of Short Contributions in the Field of Optics and Interaction of Light with Matter》 |2012年第2期|140-142|共3页
作者
Yuncan Ma; Haitao Shi; Jinhai SiTao ChenFei YanFeng ChenXun Hou;
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作者单位

Key Laboratory for Physical Electronics and Devices of the Ministry of Education & Shaanxi Key Laboratory of Information Photonic Technique, School of Electronics and Information Engineering, Xi'an Jiaotong University, Xianning West Road 28, Xi'an 710049,;

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正文语种英语
中图分类光学;
关键词
Microchannels; Element change; Silicon; Femtosecond laser;

机译：微通道;元素变化;硅;飞秒激光;

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Photoinduced microchannels and element change inside silicon by femtosecond laser pulses

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