Transfer process of multilayer optical coatings for patterned components

Marie Duchene; Anna-Maria A. van Veggel; Frederic LemarquisCatherine Grezes-BessetSheila RowanJim HoughMichel Lequime

首页> 外文期刊>Optics Communications: A Journal Devoted to the Rapid Publication of Short Contributions in the Field of Optics and Interaction of Light with Matter >Transfer process of multilayer optical coatings for patterned components

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Transfer process of multilayer optical coatings for patterned components

机译：用于图案化元件的多层光学镀膜的转移工艺

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摘要

The capability to transfer a multilayer coating from the initial substrate on which it was deposited to another one is an interesting technique for the manufacturing of patterned components with a high number of different filters such as stripe filters. The two major technological steps of the transfer, namely the removal from the initial substrate, and the bonding onto the new one, are described in this paper. The principle of this approach is validated by the transfer of a band-pass filter with the typical sizes of a stripe.

机译：将多层涂层从沉积多层涂层的初始基材转移到另一个基材的能力是一种有趣的技术，用于制造具有大量不同滤光片（如条纹滤光片）的图案化组件。本文描述了转移的两个主要技术步骤，即从初始基板上去除和粘合到新基板上。这种方法的原理是通过传输具有典型条纹尺寸的带通滤波器来验证的。

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来源
《Optics Communications: A Journal Devoted to the Rapid Publication of Short Contributions in the Field of Optics and Interaction of Light with Matter》 |2012年第2期|128-132|共5页
作者
Marie Duchene; Anna-Maria A. van Veggel; Frederic LemarquisCatherine Grezes-BessetSheila RowanJim HoughMichel Lequime;
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作者单位

Institut Fresnel/RCMO, UMR CNRS 6133, Domaine Universitaire de Saint Jerome, 13397 Marseille Cedex 20, France;

SUPA, Institute for Gravitational Research, Department of Physics and Astronomy, University of Glasgow, Glasgow, G12 8QQ UK;

CILAS, etablissement de Marseille, Avenue de la Roche Fourcade, 13400 Aubagne, France;

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原文格式 PDF
正文语种英语
中图分类光学;
关键词
Optical thin films; Optical coatings; Coating transfer; Array filter; Stripe filter; Silicate bonding;

机译：光学薄膜;光学镀膜;涂层转移;数组过滤器;条纹过滤器;硅酸盐键合;

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Transfer process of multilayer optical coatings for patterned components

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