Absolute three-dimensional shape measurements using coaxial and coimage plane optical systems and Fourier fringe analysis for focus detection

Takeda M.; Miyamoto Y.; Tanaka H.Gu RW.Zhang ZB.Aoki T.

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Absolute three-dimensional shape measurements using coaxial and coimage plane optical systems and Fourier fringe analysis for focus detection

机译：使用同轴和共像平面光学系统以及用于焦点检测的傅里叶条纹分析进行绝对三维形状测量

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摘要

For the absolute and shade-free shape measurement of 3-D objects with large height discontinuities, a coaxial optical sensor system with a common image plane for pattern projection and observation is proposed. Experimental results are presented that demonstrate the shape measurements of objects with a deep hole and large discontinuities. (C) 2000 Society of Photo-Optical instrumentation Engineers. S0091-3286(00)00701-7. References: 18

机译：针对高度不连续性较大的三维物体的绝对和无阴影形状测量，该文提出一种具有公共图像平面的同轴光学传感器系统，用于图案投影和观察。实验结果证明了对深孔和大不连续性物体的形状测量。（c） 2000年光电仪器工程师学会。[S0091-3286（00）：00701-7].[参考资料： 18]

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《Optical Engineering》 |2000年第1期|61-68|共8页
作者
Takeda M.; Miyamoto Y.; Tanaka H.Gu RW.Zhang ZB.Aoki T.;
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作者单位

Univ Electrocommun, Dept Informat & Commun Engn, 1-5-1 Chofugaoka, Chofu, Tokyo 182.;

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);
原文格式 PDF
正文语种英语
中图分类光学仪器;
关键词
Profilometry; Shape measurement; Optical metrology; Three-dimensional sensing; Transform profilometry; Objects; Light; Resolution; Topography; Surfaces;

机译：轮廓测量;形状测量;光学计量;三维传感;变换轮廓仪;对象;光;分辨率;地形;表面;

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Absolute three-dimensional shape measurements using coaxial and coimage plane optical systems and Fourier fringe analysis for focus detection

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