Geometrically desensitized interferometry for shape measurement of flat surfaces and 3-D structures

de Groot P.; Stephenson D.; de Lega XC.

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Geometrically desensitized interferometry for shape measurement of flat surfaces and 3-D structures

机译：几何脱敏干涉测量法，用于平面和三维结构的形状测量

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We construct an interferometer for flatness testing of precision-engineered objects such as rigid disk drive platters, pump parts, and fuel injectors. A pair of phase diffraction gratings illuminate an object simultaneously at two different angles of incidence, resulting in an equivalent wavelength of 12.5 mu m. This system operates in standard phase-shifting mode for a height resolution of 0.01 mu m with up to 150 mu m of surface departure. The <1 s measurement speed, 96-mm viewing aperture, simple mechanical part alignment, and 50-mm working distance are consistent with high-volume production testing, A recently developed coherence scanning mode accommodates even larger departures and discontinuous regions such as step heights, (C) 2000 Society of Photo-Optical Instrumentation Engineers. S0091-3286(00)01001-1. References: 15

机译：我们构建了一个干涉仪，用于对精密设计的物体进行平面度测试，例如刚性盘片、泵部件和喷油器。一对相位衍射光栅以两个不同的入射角同时照亮物体，产生 12.5 μ m 的等效波长。该系统在标准移相模式下运行，高度分辨率为 0.01 μ m，表面偏离高达 150 μm。<1 秒的测量速度、96 毫米的观察孔径、简单的机械零件对准和 50 毫米的工作距离与大批量生产测试一致，最近开发的相干扫描模式可以适应更大的偏离和不连续区域，例如台阶高度，（C） 2000 年光电仪器工程师协会。[S0091-3286（00）：01001-1].[参考文献： 15]

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《Optical Engineering》 |2000年第1期|86-90|共5页
作者
de Groot P.; Stephenson D.; de Lega XC.;
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作者单位

Zygo Corp, Laurel Brook Rd, Middlefield, CT 06455, USA.;

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);
原文格式 PDF
正文语种英语
中图分类光学仪器;
关键词
Interferometry; Interferometers; Optical testing; Flatness testing; Grating;

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1. A sequence pulse counting method for shape measurement in dual-beam speckle interferometry [J] . LIU Liang, LI XiDe 中国科学:物理学力学天文学（英文版） . 2011,第4期
2. VALIDITY OF FREEHAND 3-D ULTRASOUND SYSTEM IN MEASUREMENT OF THE 3-D SURFACE SHAPE OF SHOULDER MUSCLES [J] . Umehara Jun, Fukuda Norio, Konda ShojiHirashima Masaya Ultrasound in Medicine and Biology . 2022,第9期

机译：VALIDITY OF FREEHAND 3-D ULTRASOUND SYSTEM IN MEASUREMENT OF THE 3-D SURFACE SHAPE OF SHOULDER MUSCLES
3. Precision Surface Shape Measurement of Transparent Plate Using Wavelength- Tuning Interferometry [J] . Kim Hwan, Jeon Jurim, Kim Yangjin Daehan Gigye Hakoe Nonmunjib. A . 2023,第4期

机译：Precision Surface Shape Measurement of Transparent Plate Using Wavelength- Tuning Interferometry
4. Surface shape measurement by wavelength scanning interferometry using an electronically tuned Ti : sapphire laser Review [J] . Yamamoto A., Sunouchi K., Wada S.Yamaguchi I.Tashiro H.Kuo CC. Optical review . 2001,第1期

机译：Surface shape measurement by wavelength scanning interferometry using an electronically tuned Ti : sapphire laser Review
5. A new design technique based on a suitable choice of rotor geometrical parameters to maximize torque and power factor in synchronous reluctance motors: part II -finite-element analysis and measurements [C] . Ivan Eduardo Chabu, Viviane Cristine Silva, Silvio I. Nabeta, IEEE International Electric Machines and Drives Conference . 1997

机译：A new design technique based on a suitable choice of rotor geometrical parameters to maximize torque and power factor in synchronous reluctance motors: part II -finite-element analysis and measurements
6. Computer Vision Based Method and System for Online Measurement of Geometric Parameters of Train Wheel Sets [O] . Hong-Jun Yang, Kun Yang, Yu-Fen Ren, 2011

机译：Computer Vision Based method and system for Online measurement of Geometric parameters of Train Wheel sets
7. Manuel sur la Fatigue des Structures. II. Causes et Prevention de l' Endommagement. 7. Endommagement Mecanique de la Surface (Structural Fatique Manual. II. Causes and Prevention of Damage. 7. Mechanical Surface Damage), [R] . barrois,william g. 1978

机译：manuel sur la Fatigue des structures。 II。导致和预防在Endommagement。 7. Endommagement mecanique de la surface（结构Fatique手册.II。原因和预防损害.7。机械表面损伤），

Geometrically desensitized interferometry for shape measurement of flat surfaces and 3-D structures

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